Abstract

We present a method for the treatment of the boundary conditions and the particle loading in a self-consistent semi-infinite Particle-In-Cell simulation. We assume a nonionizing, collisional plasma in contact with an electrode. The simulation is planar and one-dimensional (1d-2v), and is driven by an rf and/or DC current source. The particle loading is done by appropriate drifting velocity distributions, both for ions and electrons. Limiting the simulation to the region immediately adjacent to the electrode dramatically improves run-times and diagnostic resolution and is ideal for studying the sheath and plasma-sheath interface independently from the rest of the plasma. The method can be generalized easily to model cylindrical and spherical geometries, and surface processes can also be included. The control parameters of the simulation are the values for the current drive (Irf, ωrf, IDC), the species temperatures in the bulk plasma Ts, and the values of the ion fluxes Γs.

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