Abstract
Color centers in diamond have garnered significant attention for applications in integrated quantum photonics. The availability of thin (∼ hundred of nanometers) diamond membranes is paramount to achieve this goal. In this paper, we describe in detail a robust, reproducible and cost effective fabrication method that enables engineering high quality thin diamond membranes with uniform distribution of germanium vacancies employing microwave plasma chemical vapor deposition. We use a combination of different germanium precursors for homogeneous doping of the membranes to increase the probability of germanium incorporation into the diamond lattice. Our fabrication methodology can be further extended to implementation of other color centers in thin diamond membranes and be used for engineering quantum photonic devices.
Highlights
The recent improvements in the growth techniques and availability of synthetic diamonds enabled the development of new engineering materials for advanced, electronic, thermal, and quantum applications [1,2,3,4]
high pressure high temperature growth (HPHT) annealing has been shown to brighten some of the group IV defects and make the luminescence lines narrower (e.g. SnV)21, but it cannot be used for diamond membranes due to their small thickness
In this work we investigate the possibility of homogeneous incorporation of germanium vacancies (GeV) color centers into diamond membranes using microwave plasma chemical vapor deposition (CVD) (MPCVD) process
Summary
The recent improvements in the growth techniques and availability of synthetic diamonds enabled the development of new engineering materials for advanced, electronic, thermal, and quantum applications [1,2,3,4]. A 532 nm laser excitation with high numerical objective (NA = 0.9) was used as excitation source This could be due to vaporizing of the germanium during high temperature growth before it is embedded into the diamond structure. Three pressed germanium dioxide (GeO2) powder pieces of 1 mm size were placed about 1 cm away from the diamond membrane on a carbon puck, that undergone the same overgrowth process
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