Abstract
We demonstrate boron and nitrogen co-doping of diamond-like carbon (DLC) film by vaporizing borane ammonia for applications in anti-scratch and extremely robust transparent conductive films. This method allows for facile fabrication of boron and nitrogen co-doped DLC (BNDLC) film with ultra-flat surface and uniform thickness. The simultaneous occurrence of graphitization and boron and nitrogen co-doping of DLC film induced by increasing the co-doping temperature was observed and lead to a significant decrease in the sheet resistance. As a result, the sheet resistance and optical transmittance at 550nm of the BNDLC were 3.53±0.19kΩ/sq and 81.25%, respectively.
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