Abstract
Deposition of low-Z coatings of boron and boron carbon alloys by a low pressure plasma CVD at temperatures below 500°C is described. The coatings are characterized by various methods including XPS and electrical conductivity measurements. It is shown that alloying boron with carbon results in improved properties of the coatings.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have