Abstract
In view of high-performance light-weight X-ray optics, we developed a unique technology and assembly tool to stack structured and bend monocrystalline silicon plates resulting in a matrix-like pore structure, the so-called Silicon Pore Optics (SPO). The fully automated assembly robot is specifically developed to stack SPO of various sizes and is a combination of standard semiconductor systems and newly developed tools. The complete system has a footprint of a few square meters only and is installed in a particle free environment. The robot selects a plate for stacking and inspects it for particles. The plate is then handed over to the actual stacking tool, which will elastically bend it into a cylindrical or conical shape. After two bend and structured silicon plates have been hydrophilically bonded to each other, the figure and interfacial particular contamination is investigated with a Fringe Reflection Technique (FRT) machine. The process of stacking is getting repeated by the assembly tool till the stack reaches a height of up to 45 plates forming a stiff self supporting structure.In this presentation, we will give account of the production of SPO with different radii. We will mainly focus on our investigations of the bond strength of the directly bonded structured silicon mirror plates. The investigation of the mechanical strength of bonds of structured plates is of high importance as the bond strength is difficult to estimate in FE modeling, but is a critical point in the overall mechanical stability of the SPO. We performed tensile testing measurements to quantify the bond strength of two different types of samples, flat and curved direct bonded structuredmonocrystalline silicon plates. The failure modes found during this tests are either separation of the bond or failure of the structured silicon plates. Thereby, the tensile test results show clearly what failure mode it is. Furthermore, we post-annealed the samples at various temperatures and for different times in order to increase the bond strength and thus improve the stability of the stacks.
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