Abstract
This paper reports on the bond strength comparison between silicon and different glass based materials via anodic bonding approach. The three types of glass based surface used were silica, pyrex, and soda lime glass. Silicon will be placed on the positive terminal and glass based materials will be placed on the negative terminal. Experiments were carried out using an in-house designed anodic bonder and the bond strength were measured using a bond strength tester. The anodic bonding approach process was done in two sets which are before and after the cleaning process for each sample. For every set, there are three different bonding partners, which are silicon with silica, silicon with Pyrex, and silicon with soda lime glass. From the results, it can be seen that almost all samples showed higher bond strength after the cleaning process. Silicon with soda lime glass bonding shows the highest bond strength compared with other materials.
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