Abstract
Laser absorption spectroscopy of aluminium atoms in pulsed magnetron discharge with pure argon, argon/oxygen, and argon/methane gas mixtures is reported. Time-averaged densities and temperatures of sputtered aluminium atoms were extracted from the absorption signal. The measured Al density depended almost linearly on the pulse current and showed a small dependence on pressure. Al atom temperature increased with discharge current and vice versa with pressure. A drastic decrease of the Al atom density was observed in the Ar/O2 mixture. The Al density dropped to a value close to zero once a critical oxygen gas flow rate was reached. This critical oxygen gas flow was significantly higher in pulsed mode than in DC mode.
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