Abstract

We've developed Bit Cost Scalable (BiCS) flash technology as a three-dimensional memory for the future ultra high density storage devices, which extremely reduces the chip costs by vertically stacking memory arrays with punch and plug process. We've advanced it to Pipe-shaped BiCS flash memory with U-shaped NAND string, improving the operation window and the reliability and realizing the Multi-Level-Cell (MLC) operation. The functionality has been successfully demonstrated using the 32 Gbit test chip with the 16 stacked layers and the MLC operation by 60nm P-BiCS flash technology.

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