Abstract

Bis(β-ketoiminate) dioxo tungsten(VI) complexes WO2L2 (L = acNac, acNacMe, acNacEt) have been synthesized and characterized. The thermal behaviors and possible decomposition mechanisms of these dioxo compounds were studied by TGA, MS and thermolysis. The performance of WO2(acNacMe)2 as an AACVD precursor was evaluated at growth temperatures of 250–550 °C using nitrogen as the carrier gas. The elemental compositions of the as-deposited and sputtered tungsten oxide films were determined by XPS. The morphology and stoichiometry of the as-deposited films were studied by SEM and XRD.

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