Abstract
Magnetostrictive microcantilever (MSMC) as remote biosensor platform is reported. The mass sensitivity of the MSMCs is simulated and compared with the other microcantilevers. MSMCs with a thickness of 30–35μm and different lengths and widths were fabricated from the magnetostrictive metal glass coated with a copper layer by sputtering. The resonance behavior of the MSMCs was experimentally determined. It is experimentally found that the MSMCs work well in either air or liquid. For MSMCs operated in air, a Q value of more than 500 was obtained. For MSMCs operated in water, the Q value reaches more than 30. The application of a MSMC as a biosensor platform is demonstrated by in situ detection of the yeast cells in water using the MSMC sensor.
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