Abstract

Recent advances in bio-optical methods for Medical Diagnostics, Optical Biopsy and Non-Invasive Imaging have the potential to prolong and improve the quality of life while significantly reducing medical costs for the diagnosis and tracking of diseases. Advances in the Genomics and pharmaceutical discovery using micro-array technology and High Throughput Screening permit to study thousands of compounds in short periods of time. This paper presents a new Si-based photonic sensors and sensor arrays with internal discrete amplification that offers the necessary qualities thus allowing development of a new generation of high gain, ultra low noise, universal analog and counting photodetectors for bio-optical sensing applications. The new photodetectors can operate in the linear detection mode with a gain-bandwidth product of up to 10<sup>15</sup>/sec and in the photon counting mode with count rates of up to 10<sup>9</sup> counts/sec. Detectors based on this amplification mechanism could have performance parameters superior to those of conventional avalanche photodiodes and photomultiplier tubes. For tested silicon photodetector prototypes, measured excess noise factor is as low as 1.02 at gains greater than 100,000.

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