Biological monitoring of arsenic in semiconductor workers

Abstract

AbstractIn the manufacture of integrated circuits involving semiconductors, various hazardous materials including arsenic compounds are used. This paper present an evaluation of the biological monitoring of arsenic in the urine, blood and hair of semiconductor workers. Eighty‐two blood samples were obtained from research and development workers in a semiconductor factory. Thirty‐one samples of urine were obtained from the same group of worker before and after a work period (one shift). Seventy‐three hair samples were similarly obtained from the workers. The concentration of arsenic in each sample was determined by arsine (AsH3) generation flame atomic absorption spectrometry after wet ashing of the sample. The mean concentration of arsenic in hair in these semiconductor workers was significantly higher than that of controls. The mean concentration of arsenic in hair from workers with a longer employment duration was higher than from those with a shorter employment duration. The mean concentration of arsenic in hair from workers engaged in epitaxial growth processes was higher than from workers engaged in other processes. The concentrations of arsenic in hair from semiconductor workers correlated with the duration of their employment. The mean concentration of arsenic in urine before a work a period (shift) was not significantly different from that of controls. The mean concentration of arsenic in urine after a work period was in fact lower than that of controls. The mean concentration of arsenic in blood was not significantly different from that of controls. The determination of arsenic in hair is therefore considered useful for the evaluation of relatively long‐term exposure to arsenic in semiconductor workers.