Abstract

Internal mechano-sensors, as an indispensable part of the proprioceptive system of intelligent equipment, have attracted enormous research interest because of their extremely crucial role in monitoring machining processes, real-time diagnosis of equipment faults, adaptive motor control and so on. The mechano-sensory structure with signal-transduction function is an important factor in determining the sensing performance of a mechano-sensor. However, contrary to the wide application of the cantilever beam as the sensory structure of external mechano-sensors in order to guarantee their exteroceptive ability, there is still a lack of an effective and widely used sensory structure to significantly improve the sensing performance of internal mechano-sensors. Here, inspired by the scorpion using the specialized slit as the sensory structure of internal mechano-sensilla, the slit is ingeniously used in the design of the engineered internal mechano-sensor. In order to improve the deformability of the slit wake, the hollowed-out design around the slit tail of biological mechano-sensilla is researched. Meanwhile, to mimic the easily deformed flexible cuticular membrane covering the slit, the ultrathin, flexible, crack-based strain sensor is used as the sensing element to cover the controllable slit wake. Based on the coupling deformation of the slit wake, as well as the flexible strain sensor, the slit-based mechano-sensor shows excellent sensing performance to various mechanical signals such as displacement and vibration signals.

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