Abstract
Silicon-based polymers show great promise for various applications in biomedicine, nanotechnology, tissue targeting, and drug delivery. The use of such materials as functional coatings on surfaces requires the development of strongly adhering and flexible conformal films, which is challenging for conventional wet-chemical coating techniques. We have developed a facile, solvent-free molecular layer deposition (MLD) process to grow environmentally stable hybrid alumosilazane thin films. Exceptionally good biocompatibility is testified with significantly higher proliferation of human embryonic kidney (HEK293T) cells than that on glass, which was used as a reference. Such highly biocompatible and conformal films show great promise as functional coatings for scaffolds or implantable devices with complex topologies or high-aspect-ratio structures.
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