Biocompatible and sustainable power supply for self-powered wearable and implantable electronics using III-nitride thin-film-based flexible piezoelectric generator

Abstract

Energy harvesters that scavenge biomechanical energy are promising power supply candidates for wearable and implantable electronics. Of the most widely used energy harvesters, piezoelectric generators can generate more electric charge than their triboelectric counterparts with similar device size, thus are more suitable to make compact wearable devices. However, most high-power piezoelectric generators are made from lead zirconate titanate, making them undesirable for wearable applications due to the toxic lead element. In this study, a flexible piezoelectric generator (F-PEG) is fabricated with chemically stable and biocompatible Group-III-nitride (III-N) thin film by a layer-transfer method. The III-N thin-film F-PEG can generate an open-circuit voltage of 50 V, a short-circuit current of 15 µA, and a maximum power of 167 µW at a load resistance of 5 MΩ. Applications of the III-N thin-film F-PEG are demonstrated by directly powering electronics such as light-emitting diodes and electric watches, and by charging commercial capacitors and batteries to operate an optical pulse sensor. Furthermore, the III-N thin-film F-PEG shows good durability and a stable output after being subjected to severe buckling tests of over 30,000 cycles.