Bilayer Source/Drain Electrodes Self-Aligned With Fluoropolymer Dielectrics for Stable High-Performance Organic TFTs

Abstract

We propose a systematic fabrication method for stable high-performance organic thin-film transistors (TFTs) that are potentially compatible with high-density integrated circuits. Ag/PEDOT:PSS bilayers provide source/drain (S/D) electrodes with low sheet resistance and efficient hole injection capabilities, leading to high-performance bottom-contact pentacene TFTs with a saturation mobility of 0.19 cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> / V·s. Patterned dielectric layers based on a fluoropolymer Cytop function as a hydrophobic bank structure to define S/D electrodes in a self-aligned manner from Ag ink and a PEDOT:PSS solution while simultaneously improving the electrical stability of pentacene TFTs.