Abstract
The physical vapour deposition process of serial bideposition is used to fabricate inorganic retardation plates of LaF 3 , NdF 3 , Sc 2 O 3 and SmF 3 . For a deposition angle of 70° the form-birefringent materials exhibit linear birefringence in the range 0.09–0.13 at wavelength 248 nm. The study shows that NdF 3 and Sc 2 O 3 are unsuitable for use at 193 nm, due to excessive absorptive loss, and that LaF 3 is the preferred material.
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