Abstract
Biaxially oriented CaF 2 films have been created by first using an oblique incidence vapor flux to deposit CaF 2 onto an amorphous surface to form vertically aligned nanorods which served as seeds to grow a more continuous CaF 2 capping layer under a subsequent normal incidence flux deposition. The entire film possesses a unique {1 1 1}〈1 2 1〉 biaxial texture as shown by X-ray pole figure analysis and transmission electron microscopy (TEM). This unique texture formation is a result of shadowing and surface diffusion effects. This biaxially oriented film on an amorphous substrate may be useful as a buffer layer to grow active semiconductor devices.
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