Abstract
The biaxial moduli of coherently strained Si1−xGex thin films have been determined over the composition range x=0.15–0.6 from independent measurements of film stress and strain. Our results indicate that use of the rule of mixtures to determine the strained-alloy elastic constants from the bulk values for pure Si and Ge is valid, and that higher-order elastic effects are relatively unimportant over this composition range.
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