Bias voltage dependence properties of cadmium oxide films deposited by d.c. reactive magnetron sputtering

Abstract

Cadmium oxide films were grown on glass substrates using d.c. reactive magnetron sputtering technique by sputtering from a metallic cadmium target in an oxygen partial pressure of 1×10−3 mbar under various substrate bias voltages. The substrate bias voltage significantly influences the crystallographic structure of the deposited films. The influence of substrate bias voltage on the electrical and optical properties of the films was systematically studied. The films formed at a substrate temperature of 473 K and bias voltage of −80 V showed an electrical resistivity of 1×10−3 Ω cm, optical transmittance of 86%, optical band gap of 2.47 eV and a figure of merit of 7×10−3 Ω−1.