Abstract

One of the characteristic features of tunneling magnetoresistance (TMR) sensors is a strong influence of bias voltage on tunneling current. Since fundamental sensing characteristics of the sensors are primarily determined by the tunneling current, the bias voltage should impact these characteristics. Previous research has indeed showed the influence of the bias voltage on the magnetic field detection and sensitivity. However, the effect has not been investigated for nonlinearity and hysteresis and the influence of bias voltage polarity has not yet been addressed. Therefore, this paper systematically investigates the dependence of field sensitivity, nonlinearity, hysteresis and magnetic field detection of CoFeB/MgO/CoFeB-based magnetoresistance sensors on bias voltage magnitude and polarity. The sensitivity and field detection of all sensors improved significantly with the bias, whereas the nonlinearity and hysteresis deteriorated. The sensitivity increased considerably (up to 32 times) and linearly with bias up to 0.6 V. The field detection also decreased substantially (up 3.9 times) with bias and exhibited the minimum values for the same magnitude under both polarities. Significant and linear increases with bias were also observed for nonlinearity (up to 26 times) and hysteresis (up to 33 times). Moreover, not only the voltage magnitude but also the polarity had a significant effect on the sensing characteristics. This significant, linear and simultaneous effect of improvement and deterioration of the sensing characteristics with bias indicates that both bias voltage magnitude and polarity are key factors in the control and modification of these characteristics.

Highlights

  • The tunneling magnetoresistance (TMR) sensors based on a CoFeB/MgO/CoFeB structure exhibit unique design properties and high-performance sensing capabilities

  • This paper investigated the influence of the polarity and magnitude of the bias voltage on the fundamental sensing characteristics of CoFeB/MgO/CoFeB-based tunneling

  • This paper investigated the influence ofinvestigated the polarity of the biashysteresis magnetoresistance sensors

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Summary

Introduction

The tunneling magnetoresistance (TMR) sensors based on a CoFeB/MgO/CoFeB structure exhibit unique design properties and high-performance sensing capabilities. Sensing characteristics of TMR sensors such as field sensitivity, nonlinearity, hysteresis and magnetic field detection are primarily determined by the tunneling current and its fluctuation. This work systematically investigates the influence of bias voltage polarity and magnitude on field sensitivity, nonlinearity, hysteresis and magnetic field detection of CoFeB/MgO/CoFeB-based tunneling magnetoresistance sensors. It focuses on sensors designed with the same properties but significantly different field sensitivities of 2.7 V/T, 45 V/T and 127 V/T. The voltage magnitude, as well as the polarity, had a considerable influence on the sensing characteristics

Sensor Fabrication and Characterization
Bias Dependence of Sensing
Nonlinearity
Hysteresis
Conclusions
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