Abstract
The early stages of diamond BEN-HFCVD on iridium have been studied using a NanoAuger probe which is a particularly powerful technique to probe crystals with a lateral size lower than 150 nm. Indeed, the optimal experimental conditions provide an electron beam with a diameter of 20 nm. More, the KVV Auger transition has a high sensitivity to the carbon binding state. According to our results, the BEN step is absolutely required to promote diamond nucleation on iridium otherwise the formation of graphite layers takes place under the CVD environment. The expected mechanisms induced by the ion bombardment are further discussed.
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