Abstract
Abstract The CrAlSiN films were fabricated by multi-arc ion plating technique under varying deposition bias voltages. The results showed that an amorphous/nanocrystalline structure containing CrN, AlN and Si3N4 phases was observed for CrAlSiN film. The adhesion and toughness of film played the key role in improving the wear situation in seawater, which could effectively inhibit the generation and propagation of crack. Meanwhile, the protection function of film could be improved by proper bias voltage, which could enhance the densification of film and inhibit the permeation of corrosion medium. In addition, the CrAlSiN film under bias voltage of −60 V presented the lowest COF of 0.18 and wear rate of 3.44 × 10−7 mm3/Nm in seawater, indicating the best anti-friction and anti-wear abilities.
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