Abstract
We prepared Bi2Sr2Can−1CunOy superconducting films using sputtering gas, including He, and an off-axis geometry. From the results we found that Bi-2212 and Bi-2223 single-phase films with high crystallinity were prepared at 680 °C and 720 °C using the target of Bi:Sr:Ca:Cu = 2:2:1:2 and Bi:Sr:Ca:Cu = 3:2:2:3, respectively. Therefore, the growth temperatures for obtaining single-phase films with high crystallinity tend to increase with the number of Cu–O layers, n. In addition, the Bi contents were deficient in the films with n > 3, since the optimum substrate temperatures increased with n.
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