Abstract
A thin film giant magneto impedance (GMI) based on magnetic field sensor has been developed using electrodeposited Ni-Fe permalloy. Chemical composition, surface morphology, and magnetic properties of Ni-Fe permalloy were char-acterized as a function of plateup parameters, and process conditions were established to deposit a Ni-Fe thin film with a high permeability (~1000) and a low coercivity (0.6 Oersted). Conventional GMI sensors are uni-directional and are several millimeters long. In this work, a spiral-shaped sensor using electroplated Ni-Fe permalloy to detect bi-directional magnetic field is reported. Excellent bi-directional magnetic field sensing has been demonstrated using the 1 mm2 compact double-spiral structure.
Highlights
The giant magneto impedance (GMI) effect consists of a large change in alternating current (AC) complex impedance in soft magnetic materials, and is in the presence of an applied DC magnetic field
This work has demonstrated the first ever bi-directional magnetic field sensor based on the GMI effect, using dual spiral shaped sensor element
The spiral structure provides the best alternate approach to sensing X and Y fields since it is much more compact than long metal lines typically used in uniaxial GMI sensors, which are typically 2 mm to 3 mm long
Summary
The giant magneto impedance (GMI) effect consists of a large change in AC complex impedance in soft magnetic materials, and is in the presence of an applied DC magnetic field. An emphasis has been placed on improving the sensitivity of the thin film GMI sensors by creating an alternating stack of ferromagnetic film and a non-magnetic conductor such as copper [10,11,12,13,14]. Such stacks exhibit high values of transverse and longitudinal magneto impedance with longitudinal anisotropy [12]. Atortuous shape of GMI sensor using magnetic ribbon was reported [17] with the length along with one axis significantly longer than the normal axis. A simple, low cost GMI sensor has been reported with bidirectional sensitivity
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