Abstract
The miniature and low-power devices with long service life in hard operating conditions like the Carbon-14 beta-decay energy converters indeed as eternal resource for integrated MEMS and NEMS are considered. Authors discuss how to create the power supply for MEMS/NEMS devices, based on porous SiC/Si structure, which are tested to be used as the beta-decay energy converters of radioactive C-14 into electrical energy. This is based on the silicon carbide obtaining by self-organizing mono 3C-SiC endotaxy on the Si substrate. The new idea is the C-14 atoms including in molecules in the silicon carbide porous structure by this technology, which will increase the efficiency of the converter due to the greater intensity of electron-hole pairs generation rate in the space charge region. The synthesis of C-14 can be also performed by using the electronically controlled magneto-optic chamber.
Highlights
The development of energy-saving technologies, the functioning of the MEMS devices, the reliability of their operation for a long time in offline conditions led to the search of appropriate means of generating energy for them
Authors discuss how to create the power supply for MEMS/NEMS devices, based on porous SiC/Si structure, which are tested to be used as the beta-decay energy converters of radioactive C-14 into electrical energy
The new idea is the C-14 atoms including in molecules in the silicon carbide porous structure by this technology, which will increase the efficiency of the converter due to the greater intensity of electron-hole pairs generation rate in the space charge region
Summary
The development of energy-saving technologies, the functioning of the MEMS devices, the reliability of their operation for a long time in offline conditions led to the search of appropriate means of generating energy for them. In this paper authors will discuss how to create the power source for MEMS/NEMS devices based on por-SiC/Si porous structure, which is tested to be used as the beta-decay energy converter of radioactive Carbon-14 into electrical energy [6,7,8,9]. This involves silicon carbide obtaining by selforganizing mono 3C-SiC endotaxy way on the Si substrate [10, 11]. The use of the product will effectively solve the following problems: the provision of energy for autonomous systems and devices, MEMS devices, sensors in oil capital constructions as example, information systems systems, including biosensors of medical direction and equipment
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