Abstract
AbstractBeta silicon carbide (3C-SiC) diodes have been fabricated using ion implantation as the selective doping technique. Previous work on 3C-SiC diodes have exhibited properties such as low reverse breakdown voltages and high ideality factors. Also, 6H and 4H SiC diodes have been reported. This paper studies a different procedure to produce better 3C-SiC diodes for use in the electronics industry. Current versus voltage, capacitance versus voltage and temperature versus voltage tests were conducted on the devices.Isolation between devices is a prominent concern when building integrated circuits. Proton bombardment is the preferred planar process for forming isolation regions in gallium arsenide (GaAs) due to the lack of a stable native oxide. Hydrogen and boron in GaAs have exhibited good electrical isolation between devices. This paper investigates using proton bombardment to form isolation regions in 3C-SiC. Cubic SiC samples are implanted with a variety of implant doses, ranging from 1 × 1014 to 1 × 1015 ions / cm2 , and implant energies ranging from 150 to 300 keV. Hall measurement tests were performed to study the characteristics of the implanted material.
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