Benefits of energy filtering for advanced convergent beam electron diffraction patterns

Abstract

Energy filtering is well known to have a dramatic effect on the appearance of standard, zone-axis convergent beam electron diffraction patterns. In this paper, the effects of energy filtering on some less-common types of CBED patterns are shown. In particular, the (002) and (402) quasi-forbidden reflections in silicon are investigated, and the effects of energy filtering demonstrated. The filtering of HOLZ excess lines in large-angle zone-axis patterns is shown, as these patterns are of interest for Debye-Waller factor determination. Filtered and unfiltered bright-field large-angle CBED (LACBED) patterns of aluminum are presented along with EELS spectra to demonstrate the partial removal of inelastically scattered electrons due to the LACBED geometry.