Abstract
Conformal transformation and the beam propagation method are employed for the simulation of deeply-etched bent and serpentine waveguides on an InP substrate with an active region consisting of double InGaAs quantum wells. The modal properties are analyzed and the bending and transition losses are extracted from the propagation results. For the serpentine waveguides, the transition losses increase significantly for waveguides with bending radii less than 12 μm, yet careful choice of the transition point at which the curvature reverses is shown to minimize the losses induced by the transition. Effects of etch depth are also considered and conclusion that it is necessary to etch through the active region for deeply-etched bent waveguides is drawn.
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