Behaviours of High-Energy Electrons and Neutral Atoms in the Sputtering of BaTiO3

Abstract

In the sputtering of TiO3, the substrate exhibits an abnormal temperature rise and a considerable decrease in weight. To investigate these phenomena, an energy distribution of the electrons and the yield of high-energy neutral atoms were examined. Furthermore, the discharge currents due to electrons and positive tons were estimated separately, and the electron current was divided into the secondary electron and thermal emission currents. In BaTiO3. aconsiderable electron yield by thermal emission was detected. From the results obtained, the following conclusions maight be expected. The abnormal temperature rise of the substrate is due to many electrons impinging upon the substrate with relatively high energies, and the large yield of high-energy neutral atoms bombarding the substrate is responsible for weight diminution of the substrate.