Abstract
Zinc oxide nanostructured materials, such as films and nanoparticles, could provide a suitable platform for development of high performance biosensing material due to their unique fundamental material properties. In this study, the enzyme biosensing consisting of a zinc oxide (ZnO) nanoparticles were grown on SiO2/Si substrates by vacuum thermal evaporation method and their sensing characteristics are examined in air and investigated. The film morphology is characterized by X-ray diffraction (XRD) the film crystalline quality and by scanning electron microscopy (SEM). Also, the interest in surface waves appeared due to evanescent waves in the metallic strip grating structure (MSG-Ag/ZnO/SiO2/Si) in sub-wavelength regime. Before testing the sensor with metamaterials (MMs) lens in the sub-wavelength regime, a simulation of the evanescent wave's formation has been performed at the edge of Ag strips, with thicknesses in the range of micrometers.
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