Abstract
The research of plasma produced by a pulsed low-energy large-radius electron beam generated by the plasma-cathode electron source in the forevacuum pressure range 4-13 Pa is presented. The beam-produced plasma has been generated in nitrogen by the electron beam with energy of 8 keV and pulse duration of 1.5 ms. The emission spectrum analysis and probe measurements have been used to investigate plasma parameters. Density of beam-produced plasma increases linearly with increasing electron beam current. The probe measurements have demonstrated almost linear dependence of plasma density on gas pressure in the pressure range 4-13 Pa, while intensities of spectral lines came from exited plasma ions are linear dependent on beam current only in pressure range 6-13 Pa. These spectral lines have low intensities at gas pressure below 6 Pa.
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