Beam Steering Analysis in Optically Phased Vertical Cavity Surface Emitting Laser Array**Supported by the ‘Supporting First Action’ Joint Foundation for Outstanding Postdoctoral Program under Grant Nos Y7YBSH0001 and Y7BSH14001, the National Natural Science Foundation of China under Grant No 61434006, and the National Key Basic Research Program of China under Grant No 2017YFB0102302.

Abstract

Beam steering in implant defined coherently coupled vertical cavity surface emitting laser (VCSEL) arrays is simulated using the FDTD solution software. Angular deflection dependent on relative phase differences among elements, inter-element spacing, element size and emitted wavelength is analyzed detailedly and systematically. We design and fabricate 1×2 implant defined VCSEL arrays for optimum beam steering performance. Electronically controlled beam steering with a maximum deflection angle of 1.6° is successfully achieved in the 1×2 VCSEL arrays. The percentage of the power in the central lobe is above 39% when steering. The results show that the steering is controllable. Compared with other beam steering methods, the fabrication process is simple and of low cost.