Beam optics in nuclear microprobe: A review

Abstract

The beam optics in a nuclear microprobe is considered on the basis of quality criteria for focusing systems. In this consideration, empirical criteria with dominant chromatic or intrinsic spherical aberrations are used. In a more general criterion, where all aberrations can be taken into account, the maximum acceptance for a fixed beam spot size on the target is used. Another criterion, that is closest to an experiment, is based on the condition of the minimum spot size at a fixed beam current and takes into account the nonuniform distribution of ions in the phase volume. This review summarizes the studies of various types of quadrupole focusing systems and implies the need for further development of the nuclear microprobe by using aberration correctors and a compact system. The analysis of the influence of various aberrations on the resolution of a nuclear microprobe is conducted with special attention paid to the positioning aberrations in separated quadrupole probe-forming systems. It is demonstrated why integrated multiplets of quadrupole lenses are preferred in such systems. Methods to process experimental results for an adequate determination of the spot size on the target are considered.