Abstract
Diameter increase in machining of alumina green sheet with an electron beam is discussed in this paper. High speed machining experiments with a deflection coil have been performed. The following are clarified. The diameter increase is due to the beam defocus effect, produced by organic binding material. The beam defocus effect depends on the time interval of pulses, but it does not strongly depend on the distance between holes. The dynamic focal control is very effective to diameter increase. The effect of dynamic focal control is considerably influenced by the time constant of the control pattern.
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