Abstract
A new method for testing both refractive and reflective optical components using beam deflection is presented. For a beam with a 80-μm waist, 1-μrad deflections are detectable from a reflecting test surface. This corresponds to an average height resolution in the reflecting surface of eight-tenths of an angstrom over the dimensions of the beam.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
