Beam brightness and its reduction in a 1.2-MV cold field-emission transmission electron microscope

Abstract

In this paper we discuss probe properties in terms of probe currents, probe sizes, energy spread, virtual source sizes, and brightness in a 1.2-MV cold field-emission (cold FE) transmission electron microscope (TEM) equipped with a magnetic gun lens. The probe size increased gradually in proportion to the (3/8)th power of the probe current, very unusual behavior in cold FE guns but typical behavior in thermionic guns. This is due to the magnetic gun lens, which caused large emission angles for electron beams in the probe before being limited by aberrations at the gun and acceleration tube. The brightness reached the maximum at 1.62 × 1014 A/(m2sr) and then decreased with increasing the emission current. The energy spread of the beam, including the Boersch effect, was 0.32–0.50 eV, comparable to that of conventional cold FE guns without magnetic gun lens. Experimental analysis indicated that neither noises nor aberrations caused the probe size increase under the optimized illumination condition. The virtual source size increased from 11.1 to 24.7 nm with the increase in the emission current. To describe this behavior, we conjecture that this brightness reduction is due to increase in the virtual source size caused by trajectory displacement created by stochastic Coulomb interactions near the emitter.