BCB-Based Thin-Film Ka-Band Quarter-Mode SIW Packaged Filters With Ultrawide Stopband and Independently Controlled TZs

Abstract

In this article, quarter-mode substrate-integrated waveguide (QMSIW) filters featuring ultrawide stopband and flexibly allocated transmission zeros (TZs) are proposed. Eight higher modes with resonant frequencies up to 4.7 times of the fundamental mode are highly suppressed. It is realized by the combination of three approaches without extra circuit areas. First, a slot is cut in the first and last QMSIW resonators to make their resonant frequencies of higher modes different from those of other resonators. Second, avoid exciting the specific higher modes by setting the feed point in the area where the electric field strength of the higher modes is weak. Third, mismatch the higher modes when matching the passband. It is realized by using a stripline impedance transformer with its main body not exceeding the area of QMSIW resonators. Furthermore, except for the TZs derived by the classical cross-coupling matrix, two more independently controlled TZs are generated. The packaged filter is fabricated by using a benzocyclobutene (BCB)-based microelectromechanical systems (MEMS) process, which is suitable for millimeter-wave 3-D system-on-package (SOP) applications. The fabricated thin-film filter is measured with an insertion loss of 2.96 dB at 29.4 GHz and a fractional bandwidth (BW) of 17%. Higher mode suppressions up to 138.3 GHz are achieved.