Abstract
Vertical-cavity surface-emitting lasers(VCSELs) are widely used in short-reached optical interconnects and data communication links because of their low energy consumption and high modulation speed. Capacitance, as the parasitic parameters, affects the modulation bandwidth. In this paper, parasitic capacitance of VCSELs is reduced by using a low-k benzocyclobutene(BCB) planarization technique. The detail BCB planarization technique has been discussed with optimal process parameters, which is useful for high-speed VCSEL fabrication. The small signal modulation bandwidth of the low-k BCB planarization VCSEL with 7 μm oxide aperture has been achieved to 15.2 GHz.
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