Abstract
Bayesian data analysis provides a consistent probabilistic theory for the extraction of sample parameters from spectra measured with MeV ion beam analysis methods. The application of Bayesian data analysis is demonstrated on three different examples, namely the deconvolution of the apparatus function for improving the energy resolution of solid state detectors, the reconstruction of depth profiles of individual elements with confidence intervals from Rutherford backscattering measurements, and the reconstruction of surface-roughness distributions using Rutherford backscattering.
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