Abstract
Elastic recoil detection analysis (ERDA) is an important ion beam analysis (IBA) method for analysis of thin films. It does, however, suffer from broadening of the energy spectra due to multiple and plural scattering and surface roughness, with loss of depth resolution as a result. We present a method based on Bayesian probability theory to improve the depth resolution, utilising a simulation code to simulate the ERDA measurement process. The method is demonstrated on a simulated measurement on a WxCyN1−x−y/SiO2/Si sample, for which multiple and plural scattering becomes a large problem with traditional data analysis methods used with ERDA, due to the heavy mass of tungsten.
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