Abstract
Bulk Acoustic Wave (BAW) technology is highly investigated due to its silicon-based technology for further integration in the RF part of e.g. mobile phones. This paper shows the current performance of various components suitable for the US PCS-CDMA band. In particular, new results of a duplexer are presented as well as new designs for a transmit filter and a receive filter. Besides the transfer functions, measurements of the temperature coefficient for left and right skirts are shown as well. The presented results show clearly our improvements within solidly-mounted-resonator (SMR) -BAW technology. Our process flow using a 200 mm manufacturing line uses only the minimum required process steps by still keeping a high yield in combination with high process stability and high process robustness.
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