Abstract

Microrobots have a wide range of applications. The rigid–flexible composite stereoscopic technology based on ultraviolet laser cutting technology is primarily researched for the design and manufacture of microrobots and has been used to fabricate microscale motion mechanisms and robots. This paper introduces a monolithic processing technology based on the rigid–flexible composite stereoscopic process. Based on this process, a split-actuator micro flapping-wing air vehicle with a size of 15 mm × 2.5 mm × 30 mm was designed. We proposed a batch manufacturing method capable of processing multiple micro air vehicles at the same time. The main structure of 22 flapping-wing micro air vehicles can be processed at the same time within the processing range of the composite sheet with an area of 80 mm × 80 mm, and the processing effect is good.

Highlights

  • With the rapid development of computer-based integration technology, material science, aerodynamics, and micro-nano manufacturing, small bionic microrobots have aroused the interest of research institutes and scholars worldwide

  • Researchers have focused on the innovation of the robot structure, the optimization of the manufacturing process, the invention of the energy supply and driving mode, and the optimization of the control perception during the flapping-wing micro air vehicle research process

  • Processing and manufacturing macrosize robots usually rely on traditional mechanical manufacturing methods such as turning, milling, planing, grinding, drilling, etc

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Summary

Introduction

With the rapid development of computer-based integration technology, material science, aerodynamics, and micro-nano manufacturing, small bionic microrobots have aroused the interest of research institutes and scholars worldwide. These robots, which have the characteristics of solid concealment, flexibility, mobility, and economy, can be widely used in surveillance, search, and rescue utility in dangerous, complex, and unknown environments, such as ruins [1,2,3,4]. MEMS etching and deposition technology can process micro-nanoscale structures with high processing accuracy, which will be useful in the future for nanorobot structures It faced a number of challenges, including fragile silicon-based materials, stringent processing conditions, and high processing costs. The primary application of ultraviolet laser cutting is in the 2D processing of thin-layer materials

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