Abstract

Flexible pressure sensors have gained significant attention in recent years owing to their versatile applications in health monitoring, human-machine interfaces, and artificial robotics. Geometric microengineering of the active layer, including micropatterned structures, porous layers, and multilayered packed structures has been investigated to improve the sensing performance. However, accompanying challenges such as increased thickness and difficulties in achieving mass production still persist. This work presents a full printed technique for fabricating high-performance piezoresistive pressure sensors. Thermal-treated graphene oxide (TGO) colloid was selected as the printing ink. Combined with an in-situ chemical foaming strategy, structural microengineering of the piezoresistive layer was achieved. The obtained hierarchical protruding micro-domes endow the piezoresistive pressure sensors with a wide sensing range of 550 kPa and ultrathin features (18 μm). In addition, the full-printed manufacturing method enables the batch-producible fabrication of pressure sensors. These sensors can be employed for human motion detection and pressure mapping applications.

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