Batch fabricated flat winding shape memory alloy actuator for active catheter

Abstract

Batch fabrication process of a shape memory alloy (SMA) sheet based on electrochemical pulsed etching with a sacrificial dummy metal layer has been studied and flat winding S-shape SMA actuators have been developed. The actuators are 38 /spl mu/m in thickness and generated forces from 40 to 95 mN were obtained according to the width from 410 to 170 /spl mu/m. The flat winding SMA actuator could realize active catheter with small outer diameter and wide inner working channel. The batch fabrication process was also applied to micromachining of NiTi super elastic alloy (SEA) for biasing spring of the catheter.