Bacterial cellulose coated ST-cut quartz surface acoustic wave humidity sensor with high sensitivity, fast response and recovery

Abstract

A Love mode surface acoustic wave (SAW) humidity sensor based on bacterial cellulose (BC) coated ST-cut quartz was developed in this study. The BC film is composed of ultrafine interwoven fibers to form a highly porous network, and its surface contains a large amount of hydroxyl groups, which significantly improve the adsorption capability of SAW sensing layer for water molecules. This results in significant mass loading effects and enhanced responsivity of the SAW sensor. The resonant frequency of the sensor changes linearly with RH at lower relative humidity (RH) values (e.g. RH < 30%), but when RH > 80%, an exponential increase in frequency shift as a function of RH is obtained due to the enhanced mass loading effect. A frequency shift of 89.8 kHz was measured using a sensor with a BC film with a thickness of 148 nm thick when the RH was increased from 30% to 93%. The frequency of the sensor can be fully shifted back to the original reading when the RH was returned back to 30%, with the response and recovery times of 12 s and 5 s, respectively. The SAW sensor also exhibits good short-term repeatability and long-term stability for humidity sensing.