Backward Sequence Analysis for Single-Armed Cluster Tools

Abstract

This paper analyzes a backward sequence for single-armed cluster tools with processing time variations. A fundamental cycle is defined with the backward sequence, and a formula for the cycle time is derived by considering processing time variations. Then conditions for which the backward sequence is optimal are developed. The upper bound on the average cycle time from the backward sequence is also analyzed. We then show experimentally that the sequence performs well even with processing time variations.