Abstract
We propose a backside exposure liquid phase photolithography platform for the fabrication of polymer microsystems. While conventional process strategies require a solidified polymer film prior to exposure, we utilize polymer encapsulation in order to directly cross-link the polymer from solution. Silane-based surface passivation and lift-off resist are used to control polymer adhesion after removal of the encapsulation. This process platform offers many attractive features including self-aligned processing of multilayer arrangements and controlled release capabilities. The fabrication of a drug delivery vehicle made from self-organizing hydrogel bilayers is a target application of this research.
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