Abstract
In dielectric barrier discharge systems, where the cathode is covered with the dielectric layer, electric field lines may cross the cathode surface at an oblique angle θ. The secondary electrons emitted from this surface either return to the cathode due to collisions with atoms of the background gas or escape from the cathode vicinity. Using the two-term approximation to the Boltzmann equation for electrons, we have found that, for Ramsauer gases, the electron escape factor fes as a function of the angle θ unexpectedly exhibits non-monotonic behaviour. Monte Carlo simulations of backscattering of electrons performed for xenon and argon have confirmed the theoretical results and shown similar trends for non-Ramsauer gases.
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