Backscattering of Ions with Intermediate Energies

Abstract

In this paper material characterization by backscattering of ions in the energy range between a few keV and several hundred keV will be discussed. This energy range lies between those energies generally used for low energy ion surface scattering (ISS) and the high energies of light ions normally used for Rutherford backscattering (RBS) analysis. It will be shown that the descriptions used for ISS as well as RBS are applicable also at energies larger or lower respectively than those normally used for these techniques.